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AN00304 - Lithography by Local Oxidation of Titanium

Atomic force microscopy (AFM) has had a great impact on the development of the nanotechnology because of its demonstrated ability to fabricate nanostructures. Local oxidation of metallic surfaces by atomic force microscopy has shown to be a lithographic method for the fabrication of devices and patterning of structures at nanometer scale.

Picture 1: Scan range 11µm x 11µm; Z range 10nm


Picture 2: Scan range 25µm x 25µm; Z range 15nm



Download: AN00304 Lithography by Local Oxidation of Titanium.pdf