Lithography on Titanium

Lithography by local oxidation

Atomic force microscopy (AFM) has had a great impact on the development of the nanotechnology because of its demonstrated ability to fabricate nanostructures. Local oxidation of metallic surfaces by atomic force microscopy has shown to be a lithographic method for the fabrication of devices and patterning of structures at nanometer scale.


Scan range 11µm x 11µm; Z range 10nm
Scan range 25µm x 25µm; Z range 15nm

Other Nanosurf applications