Bio chip

Defect analysis of injection moulded structures

The AFM was used to measure a defect visible by eye on a bio chip. But it was not possible by optical microscopy to decide whether the structure is an elevation or a cavity.


 50x50µm image, z-range: 150nm

On the right hand side the ideal sinusoidal grid with a period of about 1µm is visible and on the left hand side the defect. Consequently it could be deduced from the AFM image that the defect was formed during the manufacturing of the master.

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