Defect analysis on a bio chip

The AFM was used to measure a defect visible by eye on a bio chip. But by optical microscopy it was not possible to decide whether the structure was an elevation or a cavity.


 50x50 µm image, z-range: 150nm

On the right hand side the ideal sinusoidal grid with a period of about 1 µm is visible and on the left hand side the defect. Consequently it could be deduced from the AFM image that the defect was formed during the manufacturing of the master.

Other Nanosurf applications