Thermal Lithography at PVAC thin film

Thermal Lithography was conducted with a laser heated cantilever on a spin-coated PVAC thin film at a silicon substrate. The Nanosurf Python scripting interface was used for defining and printing the 10 nm height structures forming a QR-Code leading to The image shows the topography of the 13 µm x 13 µm small QR-Code measured in dynamic mode using photothermal excitation.