Two microscopes are better than one! AFSEM™ by GETec
AFSEM™ is an atomic force microscope (AFM) by GETec Microscopy, designed for integration into SEM or Dualbeam (SEM/FIB) microscopes. Its open access design allows to simultaneously operate SEM and AFM inside the SEM vacuum chamber. The complimentary capabilities of AFM and SEM enable unique characterizations of your samples.
AFSEM™ enables its features while maintaining full SEM functionality. Place the probe tip where you want it be on your sample. AFSEM™'s unique, compact design lets you use your standard SEM including sample stage and add-ons, such as energy-dispersive x-ray spectroscopy (EDX) or a micro-indenter, during AFM operation without any limitation. Removal is not needed — the AFSEM™ simply moves out of the way. For larger samples, the AFSEM™ can be removed in seconds. Self-sensing cantilevers open the space above the cantilever completely, so you can use your existing accessories without limits. They also simplify your setup — adjustment is automatic.
Key features and benefits
|Direct 3D information (topography and phase)|
|Correlative microscopy of the exact same sample position by SEM and AFM|
|AFM modes supported by AFSEM™|
|Easy to operate|
|Correlated AFM-SEM microscopy|
|Additive and subtractive tomography|
|Elemental analysis and material properties|
Conductive AFM in SEM using solid Platinum tips
Talk to the experts!
Our experts will be pleased to discuss the demand of your application and analyze the possibilities of the AFSEM™ integration into your existing equipment. We will offer a dedicated solution: hardware, software, installation, training, and after-sales support. This includes on-site and on-demand support, a wide choice of cantilevers, spare parts, and calibration service.