Cross-platform integration of AFM with SEM: Offering the best of both worlds

Microscopy and Analysis 29: 14-18

Dalia Yablon, Paul Werten, Marcel Winhold, Christian H. Schwalb

AFMs have recently been integrated with a wide variety of instrumentation and spectroscopies including: Raman spectroscopy, infrared spectroscopy, time-of-flight secondary ion mass spectrometry (TOF-SIMS), and scanning electron microscopy (SEM). The challenge in these hybrid solutions is to not compromise on the capability of each individual technique while enabling new characterization methods through an integration that provides an improved, more complete understanding of the sample.

The AFSEM™ from Nanosurf/GETec provides a powerful new capability that joins the forces of AFM and SEM. AFM imaging in all the conventional AFM modes is now possible simultaneously under an SEM beam without disruption to either technique. Through its unique design and the use of self-sensing cantilevers, the unit is the first crossplatform AFM that can be integrated into all major commercial SEMs.